Fault detection and classification for a two-stage batch process

Journal of Chemometrics

Volumn 22, Issue 6, 2008, Pages 385-398

  Liu, Jialin ^a   Wong, David Shan Hill ^b  

^a FORTUNE INSTITUTE OF TECHNOLOGY   (Taiwan)

^b NATIONAL TSING HUA UNIVERSITY   (Taiwan)

Author keywords

Batch process monitoring; Canonical variate analysis; Consensus PCA; Hierarchical PCA; Partial least squares; Principal component analysis

Indexed keywords

BATCH DATA PROCESSING; FAULT DETECTION; LEAST SQUARES APPROXIMATIONS; PROCESS CONTROL; PROCESS MONITORING; SEMICONDUCTOR DEVICE MANUFACTURE;

ANALYSIS MODELS; BATCH PROCESS; BATCH PROCESS MONITORING; CANONICAL VARIATE ANALYSIS; CONSENSUS PCA; FAULT DETECTION AND CLASSIFICATION; HIERARCHICAL PCA; MULTIWAY PRINCIPAL COMPONENT ANALYSIS; PARTIAL LEAST-SQUARES; PRINCIPAL-COMPONENT ANALYSIS;

PRINCIPAL COMPONENT ANALYSIS;

EID: 53649095499     PISSN: 08869383     EISSN: 1099128X     Source Type: Journal    
DOI: 10.1002/cem.1149     Document Type: Article

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