Low-energy electron-induced reactions in condensed HMDSO

Surface Science

Volumn 602, Issue 20, 2008, Pages 3199-3203

  Ipolyi, I ^a   Swiderek, P ^a  

^a UNIVERSITY OF BREMEN   (Germany)

Author keywords

Electron bombardment; Siloxane; Thermal desorption spectrometry

Indexed keywords

ATOMS; FILMS; MATERIALS SCIENCE; MULTILAYER FILMS; SURFACE CHEMISTRY; THERMAL DESORPTION;

CONDENSED FILMS; DESORPTION PEAKS; DESORPTION TEMPERATURES; DISORDERED PHASE; ELECTRON BOMBARDMENT; HEXAMETHYL DISILOXANE; INCIDENT ENERGIES; LOW TEMPERATURES; LOW-ENERGY ELECTRONS; MULTI LAYERING; ORDERED PHASE; SILOXANE; SILOXANE MATERIALS; THERMAL DESORPTION SPECTROMETRY; TWO PHASES;

DESORPTION;

EID: 53549134241     PISSN: 00396028     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.susc.2007.06.080     Document Type: Article

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