Titanium nitride coated tungsten cold field emission sources

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 14, Issue 6, 1996, Pages 3787-3791

  Lo, W K ^a,b   Parthasarathy, G ^a   Lo, C W ^a   Tanenbaum, D M ^a   Craighead, H G ^a   Isaacson, M S ^a  

^a Cornell University   (United States)

^b SCHLUMBERGER   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 5344279812     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.588668     Document Type: Article

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