Theory of beam-induced substrate heating

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 14, Issue 6, 1996, Pages 3839-3844

  Groves, T R ^a  

^a IBM MICROELECTRONICS   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 5344231396     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.588678     Document Type: Article

References (13)

1. F. Murai, S. Okazaki, N. Saito, and M. Dan, J. Vac. Sci. Technol. B 5, 105 (1987).
2. N. K. Eib and R. J. Kvitek, J. Vac. Sci. Technol. B 7, 1502 (1989).
3. E. Kratschmer and T. R. Groves, J. Vac. Sci. Technol. B 8, 1898 (1990).
4. V. Wener, J. Appl. Phys. D 21, 116 (1988).
5. P. M. Morse and H. Feshbach, Methods of Theoretical Physics (McGraw Hill, New York, 1953), Chap. 7.4, pp. 857-868.
6. H. S. Carslaw and J. C. Jaeger, Conduction of Heat in Solids, 2nd ed. (Clarendon, Oxford, 1959).
7. A. A. Iranmanesh and R. R W. Pease, J. Vac. Sci. Technol. B 1, 91 (1983).
8. CRC Handbook of Chemistry and Physics (Chemical Rubber, Boca Raton, FL).
9. Handbook of Mathematical Functions, 9th ed., edited by M. Abramowitz and I. Stegun (Dover, New York, 1970), pp. 931-932.
10. H. A. Bethe, Handbook d. Physik (Springer, Berlin. 1933), Vol. 24, p. 519.
11. J. D. Jackson, Classical Electrodynamics, 4th ed. (Wiley, New York, 1965), Chap. 13.3, pp. 438-442.
12. H. J. Schmoranzer, Int. Rep. by U. Kaiserslautern Department of Physics, D-6750 Kaiserslautern, Germany.
13. Handbook of Mathematical Functions, 9th ed., edited by M. Abramowitz and I. Stegun (Dover, New York, 1970), Eq. 26.2.44, p. 934.