In situ tuning of omnidirectional microelectromechanical-systems microphones to improve performance fit in hearing aids

Applied Physics Letters

Volumn 93, Issue 12, 2008, Pages

  Je, Sang Soo ^a   Kim, Jeonghwan ^a   Harrison, Jere C ^a   Kozicki, Michael N ^a   Chae, Junseok ^a  

^a Arizona State University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AUDITION; COMPOSITE MICROMECHANICS; HEARING AIDS; MEMS; MICROELECTROMECHANICAL DEVICES; MICROPHONES; NANOSTRUCTURES; SOLID ELECTROLYTES;

DIRECTIVITY INDEX; ELECTROLYTE LAYERS; EXTERNAL-; IN-SITU; METALLIC NANOSTRUCTURES; MICRO-ELECTRO-MECHANICAL; PARYLENE; ROOM TEMPERATURES;

TUNING;

EID: 52949153558     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2989132     Document Type: Article

References (8)

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