Development of plasma process for preparing ultrafine aluminum nitride

Journal of Industrial and Engineering Chemistry

Volumn 6, Issue 1, 2000, Pages 1-7

  Oh, Seung Min ^a   Park, Dong Wha ^a  

^a Inha University   (South Korea)

Author keywords

Aluminum nitride; Plasma process; Synthesis mechanism; Ultrafine powder

Indexed keywords

EID: 52549110152     PISSN: 1226086X     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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