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Volumn , Issue , 2008, Pages 3746-3750
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Active disturbance rejection control of a MEMS gyroscope
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Author keywords
Active disturbance rejection control; Extended state observer; MEMS gyroscope; Rotation rate sensing
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Indexed keywords
CHLORINE COMPOUNDS;
COMPOSITE MICROMECHANICS;
CONTROL THEORY;
DEGREES OF FREEDOM (MECHANICS);
DISTURBANCE REJECTION;
MEMS;
MICROELECTROMECHANICAL DEVICES;
ROTATION;
ACTIVE DISTURBANCE REJECTION CONTROL;
APPLICATIONS.;
CROSS COUPLINGS;
EXTENDED STATE OBSERVER;
MEMS GYROSCOPE;
MEMS GYROSCOPES;
MINIMAL MODELING;
MULTI SENSORS;
NOVEL METHODS;
PROOF MASS;
ROTATION RATE SENSING;
ROTATION RATES;
UNIVERSITY OF CALIFORNIA-BERKELEY;
GYROSCOPES;
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EID: 52449109709
PISSN: 07431619
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1109/ACC.2008.4587076 Document Type: Conference Paper |
Times cited : (10)
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References (12)
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