Fundamentals of topographic substrate leveling

Journal of Applied Physics

Volumn 63, Issue 11, 1988, Pages 5251-5258

  Stillwagon, L E ^a   Larson, R G ^a  

^a LUCENT TECHNOLOGIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 5244364576     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.340388     Document Type: Article

References (9)