High sensitivity mass spectrometer system for contaminant measurement in high purity gases

Review of Scientific Instruments

Volumn 67, Issue 10, 1996, Pages 3465-3471

  Ma, Y ^a   Liu, B Y H ^a   Lee, H S ^a   Mauersberger, K ^b   Morton, J ^b  

^a UNIVERSITY OF MINNESOTA   (United States)

^b University of Minnesota   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 5244259809     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1147160     Document Type: Article

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