Electron cyclotron resonance ion source for high currents of mono- and multicharged ion and general purpose unlimited lifetime application on implantation devices

Review of Scientific Instruments

Volumn 71, Issue 2 II, 2000, Pages 899-901

  Bieth, C ^a   Bouly, J L ^b   Curdy, J C ^b   Kantas, S ^a   Sortais, P ^b   Sole, P ^b   Vieux Rochaz, J L ^b  

^a Pantechnik   (France)

^b UNIVERSITÉ JOSEPH FOURIER GRENOBLE 1   (France)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 5244252706     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1150326     Document Type: Article

References (9)

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3. P. Amdt, K. Golovanivsky, and M. Martin, Proceedings of the 11th International Workshop on Electron Cyclotron Resonance Ion Sources, Groningen, 1993; KVI-Report 996, p. 127 (1993).
4. P. Bricault et al., International Conference on Cyclotrons and Applications, Vancouver, Canada, 1992.
5. P. Sortais et al., Proceedings of the 11th International Workshop on Electron Cyclotron Resonance Ion Sources Groningen, 1993; KVI-Report 996, p. 97 (1993).
6. A. Schempp, Proceedings of the 14th International Conference on Application of Accelerators Denton, USA, Nov. 1996, Nuclear Instrum. Methods (to be published)
7. P. Sortais et al., Proceedings of the 12th International Workshop on EC-RIS, Riken, Japan, September 1995, INS-J-182.
8. Z. Q. Xie, Proceedings of the 7th International Conference on Ion Sources, Taormina, Italy, 1997; Rev. Sci. Instrum. 69, 625 (1998).
9. Z. Q. Xie, Proceedings of the 7th International Conference on Ion Sources, Taormina, Italy, 1997; Rev. Sci. Instrum. 69, 625 (1998).