Epitaxial TiN based contacts for silicon devices

Journal of Electronic Materials

Volumn 25, Issue 11, 1996, Pages 1740-1747

  Vispute, R D ^a   Narayan, J ^a  

^a North Carolina State University   (United States)

Author keywords

Cu TiN Si(100); Domain matching epitaxy; Schottky barrier; TiN Si(100)

Indexed keywords

EID: 5244234177     PISSN: 03615235     EISSN: None     Source Type: Journal    
DOI: 10.1007/s11664-996-0029-9     Document Type: Article

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