Design and fabrication of an artificial skin using PI-copper films

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2007, Pages 389-392

  Cheng, M Y ^a   Chang, W Y ^a   Tsao, L C ^a   Yang, S A ^a   Yang, Y J ^a   Shih, W P ^a   Chang, F Y ^b   Chang, S H ^a,b   Fan, K C ^a  

^a NATIONAL TAIWAN UNIVERSITY   (Taiwan)

^b INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

ARTIFICIAL ORGANS; COPPER; ELECTRODES; FABRICATION; MEMS; ROBOT APPLICATIONS; TEMPERATURE SENSORS;

ARTIFICIAL SKIN; CONDUCTIVE POLYMER; COPPER ELECTRODES; MICROMACHINING TECHNIQUES; TACTILE SENSING; TACTILE SENSING ARRAYS; TEMPERATURE AND PRESSURES; TEMPERATURE SENSING;

MACHINE DESIGN;

EID: 52249123454     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/memsys.2007.4433149     Document Type: Conference Paper

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