Design and fabrication of super-hydrophobic surfaces on silicon wafers and study of effects to hydrophobicity

Chinese Journal of Mechanical Engineering (English Edition)

Volumn 21, Issue 4, 2008, Pages 18-21

  Li, Baojia ^a   Zhou, Ming ^a   Qian, Kunxi ^a   Cai, Lan ^a  

^a JIANGSU UNIVERSITY   (China)

Author keywords

Apparent contact angles; Silicon wafers; Square pillar microstructures; Superhydrophobicity

Indexed keywords

CONTACT ANGLE; ETCHING; MICROSTRUCTURE; NONMETALS; OPTICAL DESIGN; PLASMA DIAGNOSTICS; PLASMA ETCHING; SILICON; SILICON WAFERS; SURFACE CHEMISTRY;

APPARENT CONTACT ANGLES; ARRAY MICROSTRUCTURES; CONTACT ANGLES; CONTACT STATES; DESIGN CONDITIONS; DESIGN PRINCIPLES; EXPERIMENTAL MEASUREMENTS; GEOMETRICAL PARAMETERS; HYDROPHOBIC SURFACES; SQUARE PILLAR MICROSTRUCTURES; SUPER-HYDROPHOBIC; SUPER-HYDROPHOBIC SURFACES; SUPERHYDROPHOBICITY;

HYDROPHOBICITY;

EID: 52249103795     PISSN: 10009345     EISSN: None     Source Type: Journal    
DOI: 10.3901/CJME.2008.04.018     Document Type: Article

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