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Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2007, Pages 361-364

A 3D micromixer fabricated with dry film resist

(5) Radadia, Adarsh D a Cao, Li a Jeong, Hae Kwon a Shannon, Mark A b Masel, Richard I a

a UNIVERSITY OF ILLINOIS AT URBANA CHAMPAIGN (United States)

b University of Illinois at Urbana Champaign (United States)

Author keywords

[No Author keywords available]

Indexed keywords

FABRICATION; LAMINATING; MIXERS (MACHINERY);

3D MICROSTRUCTURES; ALIGNMENT ACCURACY; FABRICATION PROCESS; LAB-ON-CHIP DEVICES; NOVEL TECHNIQUES; PROCESSING PARAMETERS; SUSPENDED STRUCTURE; WOODPILE STRUCTURE;

MEMS;

EID: 52249094393 PISSN: 10846999 EISSN: None Source Type: Conference Proceeding
DOI: 10.1109/memsys.2007.4433110 Document Type: Conference Paper

Times cited : (7)

References (9)

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