Active linear guidances for micro actuators: Alternative concepts and first prototypes

Microsystem Technologies

Volumn 14, Issue 12, 2008, Pages 1961-1973

  Denkena, Berend ^a   Brehmeier, Stefan ^a   Möhring, Hans Christian ^a  

^a LEIBNIZ UNIVERSITY HANNOVER   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

RESEARCH;

ATTRACTIVE FORCES; CAPACITIVE DISPLACEMENT; COLLABORATIVE RESEARCH; CONTROLLED SYSTEMS; DYNAMIC BEHAVIOURS; EXPERIMENTAL INVESTIGATIONS; FORCE CHARACTERISTICS; GERMANY; MATLAB /SIMULINK; MICRO ACTUATORS; REPULSIVE FORCES; RESEARCH OBJECTIVES;

AERODYNAMICS;

EID: 51849118059     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-008-0679-z     Document Type: Article

References (2)

1. Edler J, Germer C, Hansen U, Kopp D, Li J (2003) Entwurf und Simulation aktiver Mikrosysteme. In: Kolloquium "Mikroproduktion," a cooperation of the collaborative research centres 440, 499 and 516, Brunswick, pp 45-56
2. Denkena B, Kopp D, Li J (2003). Structure analysis and parameter studies of an aerostatic linear guidance for microsystems. In: Proceedings of 2nd VDE world microtechnologies congress, Munich, pp 513-516