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Microsystem Technologies

Volumn 2, Issue 1, 1995, Pages 144-148

The micromilling process for high aspect ratio microstructures

(2) Friedrich, C R a Vasile, M J a

a LOUISIANA TECH UNIVERSITY (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 51649138940 PISSN: 09467076 EISSN: 14321858 Source Type: Journal
DOI: 10.1007/BF02739547 Document Type: Article

Times cited : (5)

References (5)

1
- 36448999735
- High-resolution Focused Ion Beams
- (1993) Review of Scientific Instruments , vol.65 , Issue.5 , pp. 1105-1130
- Orloff, J.¹

2
- 0000250856
- Microfabrication by Ion Milling: The Lathe Technique
- (1994) Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures , vol.12 , Issue.4 , pp. 2388-2393
- Vasile, M.¹ Biddick, C.² Schwalm, S.³

3
- 84936151720
- Vasile M.; Friedrich C. Micron-Size Milling Tools: Fabrication and Use, Proceedings of 1995 ASPE spring Topical Meeting, pp. 30–33., April 1995

4
- 0342694709
- Louisiana Tech University, Ruston, LA.
- (1995) Characterization of Micromilling in Polymethyl Methacrylate
- Kikkeri, B.¹

5
- 0342694710
- Louisiana Tech University, Ruston, L.A.
- (1995) Adhesion of Polymethyl Methacrylate or Aluminium on High speed Steel Micromilling Cutters
- Nagarajan, T.¹

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.