High aspect ratio multi-level mold inserts fabricated by mechanical micro machining and deep etch X-ray lithography

Microsystem Technologies

Volumn 2, Issue 1, 1995, Pages 174-177

  Fahrenberg, J ^a   Schaller, Th ^a   Bacher, W ^a   El Kholi, A ^a   Schomburg, W K ^a  

^a KARLSRUHE INSTITUTE OF TECHNOLOGY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 51649136782     PISSN: 09467076     EISSN: 14321858     Source Type: Journal    
DOI: 10.1007/BF02739554     Document Type: Article

References (8)

1. Fabrication of microstructures with high aspect ratios and great structural heights by Synchrotron Radiation Lithography, galvanoforming and plastic molding (LIGA-process)
2. Microvalve system fabricated by thermoplastic molding
3. Assembly for micromechanics and LIGA