A new test facility for efficient evaluation of MEMS contact materials

Journal of Micromechanics and Microengineering

Volumn 17, Issue 9, 2007, Pages 1788-1795

  Yang, Z ^a   Lichtenwalner, D ^a   Morris, A ^b   Menzel, S ^b   Nauenheim, C ^b   Gruverman, A ^a   Krim, J ^a   Kingon, A I ^a  

^a NORTH CAROLINA STATE UNIVERSITY   (United States)

^b Wispry Inc   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPOSITE MICROMECHANICS; COMPUTER NETWORKS; CONTACT RESISTANCE; ELECTROMECHANICAL DEVICES; MEMS; MICROELECTROMECHANICAL DEVICES; NICKEL ALLOYS; PHOTORESISTS; SWITCHES; TEST FACILITIES; WEAR RESISTANCE;

CONTACT MATERIALS;

ELECTRIC CONTACTS;

EID: 51649090154     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/17/9/006     Document Type: Conference Paper

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