SCOPUS 정보 검색 플랫폼 - 논문 보기

메뉴 건너뛰기

Applied Physics A: Materials Science and Processing

Volumn 93, Issue 2, 2008, Pages 399-403

TiO2 microstructures by inversion of macroporous silicon using atomic layer deposition

(4) Langner, A a Knez, M a Muller F a Gosele U a

a MAX PLANCK INSTITUTE OF MICROSTRUCTURE PHYSICS (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

PULSED LASER DEPOSITION; SILICON; THICKNESS MEASUREMENT; THREE DIMENSIONAL;

ATOMIC LAYER DEPOSITIONS; MACRO-POROUS SILICON; SUB MICROMETERS; THREE-DIMENSIONAL MICROSTRUCTURES;

ATOMIC LAYER DEPOSITION;

EID: 51649085257 PISSN: 09478396 EISSN: 14320630 Source Type: Journal
DOI: 10.1007/s00339-008-4784-8 Document Type: Article

Times cited : (22)

References (24)

1
- 0037142065
- M.E. Davis, Nature 417, 813 (2002)
- (2002) Nature , vol.417 , pp. 813
- Davis, M.E.¹

2
- 0038602881
- S. Matthias, F. Müller, Nature 424, 53 (2003)
- (2003) Nature , vol.424 , pp. 53
- Matthias, S.¹ Müller, F.²

3
- 0032559316
- D. Zhao, J. Feng, Q. Huo, N. Melosh, G.H. Fredrickson, B.F. Chmelka, G.D. Stucky, Science 279, 548 (1998)
- (1998) Science , vol.279 , pp. 548
- Zhao, D.¹ Feng, J.² Huo, Q.³ Melosh, N.⁴ Fredrickson, G.H.⁵ Chmelka, B.F.⁶ Stucky, G.D.⁷

4
- 34250338863
- S. Grimm, K. Schwirn, P. Göring, H. Knoll, P.T. Miclea, A. Greiner, J.H. Wendorff, R.B. Wehrspohn, U. Gösele, M. Steinhart, Small 3, 993 (2007)
- (2007) Small , vol.3 , pp. 993
- Grimm, S.¹ Schwirn, K.² Göring, P.³ Knoll, H.⁴ Miclea, P.T.⁵ Greiner, A.⁶ Wendorff, J.H.⁷ Wehrspohn, R.B.⁸ Gösele, U.⁹ Steinhart, M.¹⁰

5
- 34548097197
- L. Zhao, N. Li, A. Langner, M. Steinhart, T.Y. Tan, E. Pippel, H. Hofmeister, K.-N. Tu, U. Gösele, Adv. Funct. Mater. 17, 1952 (2007)
- (2007) Adv. Funct. Mater. , vol.17 , pp. 1952
- Zhao, L.¹ Li, N.² Langner, A.³ Steinhart, M.⁴ Tan, T.Y.⁵ Pippel, E.⁶ Hofmeister, H.⁷ Tu, K.-N.⁸ Gösele, U.⁹

6
- 0025386899
- V. Lehmann, H. Föll, J. Electrochem. Soc. 137, 653 (1990)
- (1990) J. Electrochem. Soc. , vol.137 , pp. 653
- Lehmann, V.¹ Föll, H.²

7
- 33748262432
- W. Lee, R. Ji, U. Gösele, K. Nielsch, Nat. Mater. 5, 741 (2006)
- (2006) Nat. Mater. , vol.5 , pp. 741
- Lee, W.¹ Ji, R.² Gösele, U.³ Nielsch, K.⁴

8
- 3042839181
- M. Deubel, G.V. Freymann, M. Wegener, S. Pereira, K. Busch, C.M. Soukoulis, Nat. Mater. 3, 444 (2004)
- (2004) Nat. Mater. , vol.3 , pp. 444
- Deubel, M.¹ Freymann, G.V.² Wegener, M.³ Pereira, S.⁴ Busch, K.⁵ Soukoulis, C.M.⁶

9
- 34250673030
- S. Passinger, M.S.M. Saifullah, C. Reinhardt, K.R.V. Subramanian, B.N. Chichkov, M.E. Welland, Adv. Mater. 19, 1218 (2007)
- (2007) Adv. Mater. , vol.19 , pp. 1218
- Passinger, S.¹ Saifullah, M.S.M.² Reinhardt, C.³ Subramanian, K.R.V.⁴ Chichkov, B.N.⁵ Welland, M.E.⁶

10
- 0034594907
- M. Campbell, D.N. Sharp, M.T. Harrison, R.G. Denning, A.J. Turberfield, Nature 404, 53 (2000)
- (2000) Nature , vol.404 , pp. 53
- Campbell, M.¹ Sharp, D.N.² Harrison, M.T.³ Denning, R.G.⁴ Turberfield, A.J.⁵

11
- 33847647917
- A.-P. Hynninen, J.H.J. Thijssen, E.C.M. Vermolen, M. Dijkstra, A.V. Blaaderen, Nat. Mater. 6, 202 (2007)
- (2007) Nat. Mater. , vol.6 , pp. 202
- Hynninen, A.-P.¹ Thijssen, J.H.J.² Vermolen, E.C.M.³ Dijkstra, M.⁴ Blaaderen, A.V.⁵

12
- 33845210451
- D.C. Meisel, M. Diem, M. Deubel, F. Pérez-Willard, S. Linden, D. Gerthsen, K. Busch, M. Wegener, Adv. Mater. 18, 2964 (2006)
- (2006) Adv. Mater. , vol.18 , pp. 2964
- Meisel, D.C.¹ Diem, M.² Deubel, M.³ Pérez-Willard, F.⁴ Linden, S.⁵ Gerthsen, D.⁶ Busch, K.⁷ Wegener, M.⁸

13
- 0004211057
- Wiley-VCH Weinheim
- V. Lehmann, Electrochemistry of Silicon (Wiley-VCH, Weinheim, 2002)
- (2002) Electrochemistry of Silicon
- Lehmann, V.¹

14
- 0036836993
- H. Föll, M. Christopherson, J. Carstensen, G. Hasse, Mater. Sci. Eng. R 39, 93 (2002)
- (2002) Mater. Sci. Eng. R , vol.39 , pp. 93
- Föll, H.¹ Christopherson, M.² Carstensen, J.³ Hasse, G.⁴

15
- 11344268541
- S. Matthias, F. Müller, C. Jamois, R.B. Wehrspohn, U. Gösele, Adv. Mater. 16, 2166 (2004)
- (2004) Adv. Mater. , vol.16 , pp. 2166
- Matthias, S.¹ Müller, F.² Jamois, C.³ Wehrspohn, R.B.⁴ Gösele, U.⁵

16
- 51649107961
- US Patent 4∈058∈430
- T. Suntola, J. Antson, US Patent 4∈058∈430 (1977)
- (1977)
- Suntola, T.¹ Antson, J.²

17
- 21744444606
- R.L. Puurunen, J. Appl. Phys. 97, 121301 (2005)
- (2005) J. Appl. Phys. , vol.97 , pp. 121301
- Puurunen, R.L.¹

18
- 36249028183
- M. Knez, K. Nielsch, L. Niinistö, Adv. Mater. 19, 3425 (2007)
- (2007) Adv. Mater. , vol.19 , pp. 3425
- Knez, M.¹ Nielsch, K.² Niinistö, L.³

19
- 33749584329
- Z. Li, A. Rahtu, R.G. Gordon, J. Electrochem. Soc. 153, C787 (2006)
- (2006) J. Electrochem. Soc. , vol.153 , pp. 787
- Li, Z.¹ Rahtu, A.² Gordon, R.G.³

20
- 0039129509
- M.R. Hoffmann, S.T. Martin, W. Choi, D.W. Bahnemann, Chem. Rev. 95, 69 (1995)
- (1995) Chem. Rev. , vol.95 , pp. 69
- Hoffmann, M.R.¹ Martin, S.T.² Choi, W.³ Bahnemann, D.W.⁴

21
- 0037233037
- U. Diebold, Surf. Sci. Rep. 48, 53 (2003)
- (2003) Surf. Sci. Rep. , vol.48 , pp. 53
- Diebold, U.¹

22
- 0034229297
- J. Aarik, A. Aidla, T. Uustare, M. Ritala, M. Leskelä, Appl. Surf. Sci. 161, 385 (2000)
- (2000) Appl. Surf. Sci. , vol.161 , pp. 385
- Aarik, J.¹ Aidla, A.² Uustare, T.³ Ritala, M.⁴ Leskelä, M.⁵

23
- 0025521074
- H. Seidel, L. Csepregi, A. Heuberger, H. Baumgärtel, J. Electrochem. Soc. 137, 3612 (1990)
- (1990) J. Electrochem. Soc. , vol.137 , pp. 3612
- Seidel, H.¹ Csepregi, L.² Heuberger, A.³ Baumgärtel, H.⁴

24
- 35748941950
- N.W. Choi, M. Cabodi, B. Held, J.P. Gleghorn, L.J. Bonassar, A.D. Stroock, Nat. Mater. 6, 908 (2007)
- (2007) Nat. Mater. , vol.6 , pp. 908
- Choi, N.W.¹ Cabodi, M.² Held, B.³ Gleghorn, J.P.⁴ Bonassar, L.J.⁵ Stroock, A.D.⁶

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.