A micromachined thermoelectric sensor for natural gas analysis: Thermal model and experimental results

Sensors and Actuators, B: Chemical

Volumn 134, Issue 2, 2008, Pages 551-558

  Udina, S ^a,c   Carmona, M ^c   Carles, G ^a   Santander, J ^b   Fonseca, L ^b   Marco, S ^a,c  

^a UNIVERSITY OF BARCELONA   (Spain)

^b INSTITUTO DE MICROELECTRÓNICA DE BARCELONA   (Spain)

^c INSTITUTE FOR BIOENGINEERING OF CATALONIA IBEC   (Spain)

Author keywords

FEM; MEMS; Modeling; Natural gas; Thermal conductivity; Thermopile

Indexed keywords

BINARY MIXTURES; CARBON DIOXIDE; CHROMATOGRAPHIC ANALYSIS; CONTROL SYSTEM ANALYSIS; CONTROL SYSTEMS; CONTROL THEORY; CUSTOMER SATISFACTION; ELECTRIC BATTERIES; ERROR ANALYSIS; FINITE ELEMENT METHOD; GAS CHROMATOGRAPHY; GAS FUEL ANALYSIS; GAS INDUSTRY; HYDROCARBONS; MIXTURES; NATURAL GAS; ORGANIC COMPOUNDS; QUALITY ASSURANCE; QUALITY FUNCTION DEPLOYMENT; SENSITIVITY ANALYSIS; SENSORS; THERMOELECTRICITY; THERMOGRAPHY (TEMPERATURE MEASUREMENT); TOTAL QUALITY MANAGEMENT;

FEM; MEMS; MODELING; THERMAL CONDUCTIVITY; THERMOPILE;

QUALITY CONTROL;

EID: 51649083955     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2008.05.043     Document Type: Article

References (30)

1. Schley P., Jaeschke M., and Altfeld K. New technologies for gas quality determination. Proceedings of the 22nd World Gas Conference. Tokyo (2003) 1-12
2. International Energy Agency, Natural Gas Distribution-Focus on Western Europe (1998), IEA Publications, Paris pp. 15-30
3. International Organization for Standardization, ISO12213: Natural Gas-Calculation of Compression Factor. Part 1. Introduction and Guidelines. Part 3. Calculation Using Physical Properties. ISO 12213 International Standard.
4. Florisson O., and Burrie P.H. Rapid determination for the Wobbe index of natural gas. J. Phys. E 22 (1989) 123-128
5. Rahmouni C., Brecq G., Tazerout M., and Le Corre O. Knock rating of gaseous fuels in a single cylinder spark ignition engine. Fuel 83 (2004) 327-336
6. Stufkens J.S., and Bogaard H.J. Rapid method for determination of composition of natural gas by gas chromatography. Anal. Chem. 47 (1975) 383-386
7. Gas-Lab Q1 Datasheet, Elster-Instromet, www.elster-instromet.com (Last accessed on March 2008), 2006.
8. Ulbig P., and Hoburg D. Determination of the calorific value of natural gas by different methods. Thermochim. Acta 382 (2002) 27-35
9. J.V. Hinshaw, The Thermal Conductivity Detector, LGCG North America (Online magazine article), January 2006, http://chromatographyonline.findpharma.com/lcgc/Column%3A+GC+Connections/The-Thermal-Conductivity-Detector/ArticleStandard/Article/detail/283449 (Last accessed on March 2008).
10. van Herwaarden A.W., and Meijer G.C.M. Thermal sensors. In: Sze S.M. (Ed). Semiconductor Sensors (1994), John Wiley, New York 331-382
11. Pollak-Diener G., and Obermeier E. Heat-conduction microsensor based on silicon technology for the analysis of two- and three-component gas mixtures. Sens. Actuators B Chem. 13 (1993) 345-347
12. TCG-3880 DataSheet, Xensor Integration bv, 14 February 2006, www.xensor.nl (Last accessed on March 2008).
13. Puente D., Gracia J., and Ayerdi I. Thermal conductivity microsensor for determining the methane number of natural gas. Sens. Actuators B 110 (2005) 181-189
14. Wu Y.E., Chen K., Chen C.W., and Hsu K.H. Fabrication and characterization of thermal conductivity detectors (TCDs) of different flow channel and heater designs. Sens. Actuators A 100 (2002) 37-45
15. Calaza C., Meca E., Marco S., Moreno M., Samitier J., Fonseca L., Gracia I., and Cane C. Assessment of the final metrological characteristics of a MOEMS-based NDIR spectrometer through system modeling and data processing. IEEE Sens. J. 3 (2003) 587-594
16. Minakov A., Morikawa J., Hashimoto T., Huth H., and Schick C. Temperature distribution in a thin-film chip utilized for advanced nanocalorimetry. Meas. Sci. Technol. 17 (2006) 199-207
17. Salleras M., Palacín J., Moreno M., Fonseca L., Samitier J., and Marco S. A methodology to extract dynamic compact thermal models under time-varying boundary conditions: application to a thermopile based IR sensor. Microsyst. Technol. 12 (2005) 21-29
18. Baltes H., Paul O., and Brand O. Micromachined thermally based CMOS microsensors. Proc. IEEE 86 (1998) 1660-1678
19. Sabate N., Santander J., Gràcia I., Fonseca L., Figueras E., Cabruja E., and Cane C. Characterization of thermal conductivity in thin film multilayered membranes. Thin Solid Films 484 (2005) 328-333
20. Paul O., and Baltes H. Thermal conductivity of CMOS materials for the optimization of microsensors. J. Micromech. Microeng. 3 (1993) 110-112
21. von Arx M., Paul O., and Baltes H. Test structures to measure the Seebeck coefficient of CMOS IC polysilicon. IEEE Trans. Semicond. Manuf. 10 (1997) 201-208
22. Younglove B.A., and Ely J.F. Thermophysical properties of fluids. II. Methane, ethane, propane, isobutane and normal butane. J. Phys. Chem. Ref. Data 16 (1987) 577-798
23. Uribe F.J. Thermal conductivity of nine polyatomic gases at low density. J. Phys. Chem. Ref. Data 19 (1990) 1123-1136
24. Poling B.E., Prausnitz J.M., and O'Connell J.P. The Properties of Gases and Liquids. 5th ed. (2001), McGraw-Hill, New York pp. 10.1-10.70
25. Rahmouni C., Tazerout M., and Le Corre O. Determination of the combustion properties of natural gases by pseudo-constituents. Fuel 82 (2003) 1399-1409
26. Stephan K., and Laesecke A. The thermal conductivity of fluid air. J. Phys. Chem. Ref. Data 14 (1985) 227-234
27. Zhong J.-Q., and Zhang J. Thermal convection with a freely moving top boundary. Phys. Fluids 17 (2005) pp. 115105.1-115105.12
28. Amiroudine S., Bontoux P., Larroude P., Gilly B., and Zappoli B. Direct numerical simulation of instabilities in a two-dimensional near-critical fluid layer heated from below. J. Fluid Mech. 442 (2001) 119-140
29. Boutchich M., Ziouche K., Godts P., and Leclercq D. Characterization of phosphorus and boron heavily doped LPCVD polysilicon films in the temperature range 293-373 K. IEEE Electron Device Lett. 23 (2002) 139-141
30. Mielle P., and Marquis F. Improvement of the Products Database Reliability by Using New Dimensions, Seminars in Food Analysis vol. 3 (1998), Thomson Science Publisher pp. 93-105