Progress in electron beam mastering of 100 bit/inch2 density disc

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 43, Issue 7 B, 2004, Pages 5044-5046

  Takeda, Minoru ^a   Furuki, Motohiro ^a   Yamamoto, Masanobu ^a   Shinoda, Masataka ^a   Saito, Kimihiro ^a   Aki, Yuichi ^a   Kawase, Hiroshi ^a   Koizumi, Mitsuru ^a,b   Miyokawa, Toshiaki ^a,b   Mutou, Masao ^a,b   Handa, Nobuo ^a,b  

^a SONY CORPORATION   (Japan)

^b JEOL LTD   (Japan)

Author keywords

Differential pumping head; Electron beam mastering; Limit equalizer; Near field optical pickup; Reactive ion etching

Indexed keywords

ETCHING; JITTER; MOLECULAR STRUCTURE; NITROGEN; OPTICAL RECORDING; OPTIMIZATION; VACUUM PUMPS;

DIFFERENTIAL PUMPING HEAD; ELECTRON BEAM MASTERING; LIMIT EQUALIZERS; NEAR-FIELD OPTICAL PICKUP; RELATIVE ION ETCHING;

ELECTRON BEAMS;

EID: 5144234348     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/JJAP.43.5044     Document Type: Conference Paper

References (3)

1. M. Furuki, M. Takeda, M. Yamamoto, M. Shinoda, K. Saito, Y. Au, H. Kawase, M. Koizumi, T. Miyokawa and M. Mutou: Tech. Dig. Optical Data Storage Topical Meet. (2003) p. 62.
2. M. Shinoda, K. Saito, T. Ishimoto, T. Kondo, A. Nakaoki, M. Furuki, M. Takeda and M. Yamamoto: Tech. Dig. Optical Data Storage Topical Meet. (2003) p. 120.
3. F. Yokogawa, S. Miyanabe, M. Ogasawara, H. Kuribayashi, Y. Tomita and K. Yamamoto: Jpn. J. Appl. Phys. 39 (2000) 819.