Wafer defects detecting and classifying system based on machine vision

2007 8th International Conference on Electronic Measurement and Instruments, ICEMI

Volumn , Issue , 2007, Pages 520-523

  Zhen, Zeng ^a   Shuguang, Dai ^a   Ping'an, Mu ^a  

^a UNIVERSITY OF SHANGHAI FOR SCIENCE AND TECHNOLOGY   (China)

Author keywords

Defect detection; Image process; Machine vision; Neural network; Wafer

Indexed keywords

DEFECTS; IMAGE PROCESSING; IMAGE SEGMENTATION; NEURAL NETWORKS;

DEFECT DETECTION; DEFECTS CLASSIFICATION; DEFECTS INSPECTIONS; DIGITAL IMAGE; DISK IMAGES; ON-MACHINES; SYSTEM FEATURES; WAFER;

COMPUTER VISION;

EID: 51349168315     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICEMI.2007.4351196     Document Type: Conference Paper

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