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Volumn 24, Issue 7, 2008, Pages 838-842
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Effects of sputtering power on mechanical properties of Cr films deposited by magnetron sputtering
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Author keywords
Adhesion strength; Chromium; Deposition rate; Hardness; Sputtering
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Indexed keywords
ADHESION;
BOND STRENGTH (MATERIALS);
CARBON FILMS;
CARBON STEEL;
CHROMIUM;
CORROSION;
CORROSION RESISTANCE;
CRYSTAL ATOMIC STRUCTURE;
CRYSTAL STRUCTURE;
DEPOSITION RATES;
ELECTROCHEMISTRY;
ELECTROPLATING;
FIBER OPTICS;
FRICTION;
HARDNESS;
INORGANIC COATINGS;
MAGNETRONS;
MECHANICAL PROPERTIES;
METAL ANALYSIS;
PAINTING;
PHOTORESISTS;
STEEL;
STEEL SHEET;
SURFACE PROPERTIES;
SURFACE RESISTANCE;
SURFACE ROUGHNESS;
SURFACE STRUCTURE;
X RAY ANALYSIS;
X RAY DIFFRACTION ANALYSIS;
ADHESION STRENGTH;
DEPOSITION RATE;
SPUTTERING;
MAGNETRON SPUTTERING;
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EID: 51349166299
PISSN: 02670836
EISSN: None
Source Type: Journal
DOI: 10.1179/174328407X185893 Document Type: Article |
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Times cited : (16)
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References (11)
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