Wafer position sensing and motion control in the clean tube system

Proceedings of the IEEE International Conference on Industrial Technology

Volumn , Issue , 2006, Pages 1315-1319

  Kim, Yu Jin ^a   Shin, Dong Hun ^a  

^a University of Seoul   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

CONTROL METHODS; INDUSTRIAL TECHNOLOGIES; INTERNATIONAL CONFERENCES;

TUBES (COMPONENTS);

EID: 51349139602     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICIT.2006.372484     Document Type: Conference Paper

References (14)

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12. Dong Hun Shin, Chul Hwan Choi, Kyoo Sik Jeong, "Wafer Motion Control of Clean Tube System," The Society of Air-Conditioning and Refrigerating Engineers of Korea, the 16th book chapter 5 pp. 475-481, 2004.
13. Dong Hun Shin, Kyoo Sik Jeong, Chung Yong Yun, "Wafer Motion Modeling of Transfer Unit in Clean Tube System," Korea Society of Precision Engineering, the 21st book Chapter 3, pp. 66-73, 3, 2004.
14. http://robotics.uos.ac.kr