Crystalline structure and surface morphology of the AlN films sputtered on 64°-YX LiNbO3

IEEE International Symposium on Applications of Ferroelectrics

Volumn , Issue , 2007, Pages 146-148

  Chang, Feng Chih ^a   Wu, Sean ^b   Lee, Maw Shung ^c   Yu, Jian Shuo ^c   Chang, Chia Hsiung ^b   Huang, Cheng Liang ^a  

^a NATIONAL CHENG KUNG UNIVERSITY   (Taiwan)

^b TUNG FANG INSTITUTE OF TECHNOLOGY   (Taiwan)

^c NATIONAL KAOHSIUNG UNIVERSITY OF APPLIED SCIENCES   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINA; ALUMINUM COMPOUNDS;

ALN FILMS; ALUMINUM NITRIDE; CRYSTALLINE STRUCTURES; INTERNATIONAL SYMPOSIUM;

SURFACE STRUCTURE;

EID: 51349121197     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ISAF.2007.4393196     Document Type: Conference Paper

References (11)

1. T. Morita, Y. Watanabe, M. Tanaka, and Y. Nakazawa, "Wideband low loss double mode SAW filters," IEEE Ultrasonics Symp., 1992, vol. 1, pp. 95-104.
2. 3," IEEE Ultrasonics Symp., 1993, vol. 2, pp. 1247-1250.
3. J. K. Liu, K. M. Lakin, and K. L. Wang, "Growth morphology and surface-acoustic-wave measurements of AIN films on sapphire," J. Appl. Phy., 1975, vol. 46, pp. 3703-3706.
4. 3and AIN/Si," Proc. IEEE Ultrasonics Symp., 1981, pp. 375-380.
5. K. Sato, S. Umino, K. Tsubouchi, and N. Mikoshiba, "Low Temperature Growth of Epitaxial AIN Films on Sapphire," Proc. IEEE Ultrasonics Symp., 1985, pp. 192-197.
6. K. Tsubouchi and N. Mikoshiba, "Zero-Temperature-Coefficient SAW Devices on AIN Epitaxial Films", IEEE Trans. Sonic & Ultranson. 1985, vol. 32, pp. 634-644.
7. A.J. Shuskus, T. M. Reeder, and E.L. Paradis, Appl. Phys. Lett., "rf-sputtered aluminum nitride films on sapphire," 1974, vol. 24, pp. 155-156.
8. T. Shiosaki, T. Yamamoto. T. Oda, and A. Kawabata, "Low-temperature growth of piezoelectric AlN film by rf reactive planar magnetron sputtering," Appl. Phys. Lett., 1980, vol.36, pp. 643-645.
9. T. Shiosaki, T. Yamamoto. T. Oda, and A. Harada, "Low Temperature Growth of Piezoelectric AlN Film for Surface and Bulk Wave Transducers by RF Reactive Planar Magnetron Sputtering," Proc. IEEE Ultrasonics Symp., 1980, pp. 451-454.
10. C. Caliendo, G. Saggio, P. Verardi, and E. Verona, "Piezoelectric AlN film for SAW devices applications," Proc. IEEE Ultrasonics Symp., 1993, vol. 1, pp. 249-252.
11. F. S. Hickernell, "Measurement techniques for evaluating piezoelectric thin films", IEEE Ultrasonics Symp., 1996, vol. 1, pp. 235-242.