A multi-axis MEMS force-torque sensor for measuring the load on a microrobot actuated by magnetic fields

IEEE International Conference on Intelligent Robots and Systems

Volumn , Issue , 2007, Pages 3803-3808

  Beyeler, F ^a   Muntwyler, S ^a   Nagy, Z ^a   Moser, M ^a   Nelson, B J ^a  

^a ETH ZURICH   (Switzerland)

Author keywords

Capacitive force torque sensor; Magnetic actuation; MEMS; Microrobot

Indexed keywords

BIOMAGNETISM; DRUG DELIVERY; ELECTROMAGNETIC FIELD EFFECTS; FABRICATION; INTELLIGENT ROBOTS; INTELLIGENT SYSTEMS; MAGNETIC FIELD EFFECTS; MAGNETIC FIELD MEASUREMENT; MAGNETIC FIELDS; MAGNETIC MATERIALS; MICROFABRICATION; ROBOTICS; ROBOTS; TORQUE; TORQUE METERS;

CAPACITIVE FORCE-TORQUE SENSOR; MAGNETIC ACTUATION; MEMS; MICRO ROBOTS; MICROROBOT;

SENSORS;

EID: 51349098484     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/IROS.2007.4399004     Document Type: Conference Paper

References (10)

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3. M. Kummer, J. J. Abbott, K. Vollmers, B. J. Nelson, "Measuring the Magnetic and Hydrodynamic Properties of Assembled-MEMS Microrobots", Proc. 2007 IEEE International Conference on Robtoics and Automation (ICRA), April 2007.
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10. K. Kim, Y. Sun, R.M. Voyles, B.J. Nelson, "Calibration of Multi-Axis MEMS Force Sensors Using the Shape-From-Motion Method", IEEE Sensors Journal, Vol 7, No. 3, March 2007.