A theoretical model of the formation morphologies of porous silicon

Journal of Electronic Materials

Volumn 17, Issue 6, 1988, Pages 533-541

  Smith, R L ^a   Chuang, S F ^b   Collins, S D ^c  

^a UNIVERSITY OF CALIFORNIA   (United States)

^b MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

^c NONE

Author keywords

morphology; Porous silicon

Indexed keywords

EID: 51249176460     PISSN: 03615235     EISSN: 1543186X     Source Type: Journal    
DOI: 10.1007/BF02652104     Document Type: Article

References (26)

1. Etch Channel Formation during Anodic Dissolution of N-Type Silicon in Aqueous Hydrofluoric Acid
2. Anodic Dissolution of N+ Silicon
3. Structure of Porous Silicon Layer and Heat-Treatment Effect
4. Electropolishing Silicon in Hydrofluoric Acid Solutions
5. Electrochemically Thinned N/N+ Epitaxial Silicon—Method and Applications