Silicon nanophotonic wire structures fabricated by 193nm optical lithography

Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS

Volumn , Issue , 2007, Pages 48-49

  Selvaraja, Shankar Kumar ^a   Jaenen, Patrick ^b   Beckx, Stephan ^b   Bogaert, Wim ^a   Dumon, Pieter ^a   Van Thourout, Dries ^a   Bates, Roel ^a  

^a GHENT UNIVERSITY   (Belgium)

^b IMEC   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER NETWORKS; FABRICATION; PHOTOLITHOGRAPHY; SILICON;

ANNUAL MEETINGS; ELECTRO-OPTICS; OPTICAL LITHOGRAPHY;

SILICON ON INSULATOR TECHNOLOGY;

EID: 51249121395     PISSN: 10928081     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/LEOS.2007.4382268     Document Type: Conference Paper

References (3)

1. P. Dumon et al., "Linear and nonlinear nanophotonic devices based on silicon-on-insulator wire waveguides", Jap. J. of Applied Physics, vol. 45, no.8B, pp. 6589-6602, 2006.
2. W. Bogaerts et al., "Nanophotonic Waveguides in Silicon-on-Insulator Fabricated with CMOS Technology", J. Lightwavve Technonol., vol. 23, no. 1, pp. 401-412, 2005.
3. D. Taillaert et al., "An Out-of-Plane Grating Coupler for Efficient Butt-Coupling Between Compact Planar Waveguides and Single-Mode Fibers", IEEE J. of Quantum Electron., vol. 38, no. 7, pp.949-955, 2002.