Performance and reliability of airgaps for advanced BEOL Interconnects

2008 IEEE International Interconnect Technology Conference, IITC

Volumn , Issue , 2008, Pages 191-192

  Nitta, S ^a   Edelstein, D ^a   Ponoth, S ^b   Clevenger, L ^c   Liu, X ^a   Standaert, T ^c  

^a IBM T J WATSON RESEARCH CENTER   (United States)

^b IBM RESEARCH   (United States)

^c IBM   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER NETWORKS;

AIR-GAPS; INTERNATIONAL INTERCONNECT TECHNOLOGY CONFERENCE;

RELIABILITY;

EID: 51149107395     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/IITC.2008.4546963     Document Type: Conference Paper

References (3)

1. S. Nitta et. al. Adv. Metal. Conf. 2007
2. R. Daamen et al., Intl. Interconnect Tech. Con. 2005
3. H. G. Tomkins, "A Users Guide to Ellipsometry" (Academic, New York, 1993)