A self-learning method for automatic alignment in wafer processing

Proceedings of the 7th International Caribbean Conference on Devices, Circuits and Systems, ICCDCS

Volumn , Issue , 2008, Pages

  Kim, H T ^a   Lee, K W ^a   Yang, H J ^b   Kim, S C ^c  

^a Korea Institute of Industrial Technology   (South Korea)

^b Korea Poly technique University   (South Korea)

^c Research Center of AM Technology 604BL 4LT   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER NETWORKS; COMPUTER VISION; EDUCATION; ELECTRIC CONDUCTIVITY; INDUSTRIAL ENGINEERING; PRODUCTION ENGINEERING; SEMICONDUCTOR MATERIALS;

AUTOMATIC ALIGNMENT; SEMICONDUCTOR MANUFACTURING PROCESSES; TRAINING SETS;

ALIGNMENT;

EID: 51049112685     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICCDCS.2008.4542650     Document Type: Conference Paper

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