Analysis of thermal diffusivity for TiNx thin films using thermoreflectance technique

Journal of the Vacuum Society of Japan

Volumn 51, Issue 6, 2008, Pages 382-385

  Ohtsuka, Tetsuro ^a   Miyamura, Amica ^a   Sato, Yasushi ^a   Shigesato, Yuzo ^a   Yagi, Takashi ^b   Taketoshi, Naoyuki ^b   Baba, Tetsuya ^b  

^a AOYAMA GAKUIN UNIVERSITY   (Japan)

^b NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

DIFFUSION; ELECTRIC CONDUCTIVITY; ELECTRONS; HEAT CONDUCTION; MAGNETRON SPUTTERING; NITROGEN; NITROGEN PLASMA; SUBSTRATES; THERMAL DIFFUSIVITY; TITANIUM; TITANIUM COMPOUNDS; TITANIUM NITRIDE;

ALKALI FREE GLASS; DEPOSITION PROCESS; ELECTRICAL CONDUCTIVITY; GAS COMPOSITIONS; NITROGEN COMPOSITION; REACTIVE RF MAGNETRON SPUTTERING; STOICHIOMETRIC FILMS; THERMOREFLECTANCE;

THIN FILMS;

EID: 50949093546     PISSN: 18822398     EISSN: None     Source Type: Journal    
DOI: 10.3131/jvsj2.51.382     Document Type: Article

References (15)

1. J. E. Sundgren, B. O. Johansson and S. E. Kalsson: Thin Solid Fims, 97 (1982) 69.
2. L. Y. Ting: J. Vac. Sci. Technol., 21 (1982) 14.
3. K. Nakamura, D. Schulze, R. Wilberry, A. Lunk and F. Schiade: Thin Solid Films, 63 (1979) 347.
4. B. O. Johansson, J. E. Sundgren, J. E. Greene, A. Rockett and S. A. Barnett: J. Vac. Sci. Technol. A, 3 (1985) 303.
5. T. Baba: Progress in Heat Transfer, new series, Vol. 3 (Yokendo, Tokyo, 2000).
6. N. Taketoshi, T. Baba and A. Ono: Proc. of 23rd Jpn, Symp. on Thermophys. Prop., (2002) C335.
7. N. Taketoshi, T. Baba and A. Ono: Rev. Sci. Instrum., 76 (2005) 094903.
8. T. Yagi, N. Taketoshi, H. Kato and T. Baba: Proc. of 26th Jpn, Symp. on Thermophys. Prop., (2005) A112.
9. T. Baba, N. Taketoshi, K, Hatori, K. Shinzato, T. Yagi, Y. Sato and Y. Shigesato: Proc. of 25th Jpn, Symp. on Thermophys. Prop., (2004) A322.
10. T, Yagi, H. Nakamura, N. Taketoshi, H. Kato and T. Baba: Proc. of 27th Jpn, Symp. on Thermophys. Prop., (2006) J142.
11. A. Bendavid, P. J. Martin, R. P. Netterfield and T. J. Kinder: Surf. Interface Anal., 24 (1996) 627.
12. R. Uno, N. Tsuya, A. Morita and J. Yamashita: Kittel's Introduction to Solid State Physics, (Maruzen, Tokyo, 2005) 8th ed., p459 [in Japanese].
13. R. Uno, N. Tsuya, A. Morita and J. Yamashita: ibid., p421 [in Japanese].
14. S. Logothetidis, I. Alexandrou and A. Papadopoulos: J. Appl. Phys., 77 (1995) 1043.
15. T. Ashida, A. Miyamura, Y. Sato, T. Yagi, N. Taketoshi, T. Baba and Y. Shigesato: J. Vac. Sci. Technol. A, 23 (2005) 1180.