Stochastic subwavelength structures on poly(methyl methacrylate) surfaces for antireflection generated by plasma treatment

Applied Optics

Volumn 47, Issue 13, 2008, Pages

  Leitel, Robert ^a,b   Schulz, Ulrike ^b   Kaiser, Norbert ^b   Tünnermann, Andreas ^a,b  

^a FRIEDRICH SCHILLER UNIVERSITY JENA   (Germany)

^b FRAUNHOFER INSTITUTE FOR APPLIED OPTICS AND PRECISION ENGINEERING   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ASPECT RATIO; ESTERS; PLASMA APPLICATIONS; REVERSE ENGINEERING; STOCHASTIC SYSTEMS;

DEPTH DEPENDENTS; EFFECTIVE MEDIUM THEORIES; FRESNEL REFLECTIONS; GRADIENT FUNCTION; HOMOGENEOUS LAYERS; LOW PRESSURE PLASMA; PLASMA TREATMENT; SUB-WAVELENGTH STRUCTURES;

REFRACTIVE INDEX;

EID: 50849108570     PISSN: 1559128X     EISSN: 15394522     Source Type: Journal    
DOI: 10.1364/AO.47.00C143     Document Type: Article

References (13)

1. H. A. Macleod, Thin-Film Optical Filters (Taylor & Francis, 2001).
2. U. Schulz, "Review of modern techniques to generate antireflective properties on thermoplastic polymers," Appl. Opt. 45, 1608-1618 (2006).
3. C. G. Bernhard, "Structural and functional adaption in a visual system," Endeavour 26, 79-84 (1967).
4. A. Gombert, W. Glaubitt, K. Rose, J. Dreibholz, B. Bläsi, A. Heinzel, D. Sporn, W. Döll, and V. Wittwer, "Subwavelength-structured antireflective surfaces on glass," Thin Solid Films 351, 73-78 (1999).
5. A. Kaless, U. Schulz, P. Munzert, and N. Kaiser, "NANO-motheye antireflection pattern by plasma treatment of polymers," Surf. Coat. Technol. 200, 58-61 (2005).
6. J. A. Dobrowolski, D. Poitras, P. Ma, H. Vakil, and M. Acree, "Toward perfect antireflection coatings: numerical investigation," Appl. Opt. 41, 3075-3083 (2002).
7. P. Lalanne and M. Hutley, "Artificial media optical properties - subwavelength scale," in Encyclopedia of Optical Engineering, R. Driggers, ed. (Marcel Dekker, 2003).
8. R. Leitel, A. Kaless, U. Schulz, and N. Kaiser, "Broadband antireflective structures on PMMA by plasma treatment," Plasma Processes Polym. 4, S878-S881 (2007).
9. R. Leitel, J. Petschulat, A. Kaless, U. Schulz, O. Stenzel, and N. Kaiser, "Optical properties of stochastic subwavelength surface structures," Proc. SPIE 5965, 596510 (2005).
10. D. A. G. Bruggeman, "Berechnung verschiedener physikalischer Konstanten von heterogenen Substanzenm" Ann. Phys. (Leipzig) 24, 636-664 (1935).
11. D. Poitras and J. A. Dobrowolski, "Toward perfect antireflection coatings. 2. Theory," Appl. Opt. 43, 1286-1295 (2004).
12. S. Pongratz and A. Zöller, "Plasma ion-assisted deposition: a promising technique for optical coatings," J. Vac. Sci. Technol. A 10, 1897-1904 (1992).
13. S. Wilbrandt, O. Stenzel, and N. Kaiser, "In-situ broadband monitoring of heterogeneous optical coatings," Thin Solid Films 502, 153-157 (2006).