Development of roll metal mold by synchrotron radiation

2006 IEEE International Symposium on Micro-Nano Mechanical and Human Science, MHS

Volumn , Issue , 2006, Pages

  Idei, Kazuyoshi ^a   Ishizawa, Naoya ^b   Noda, Daiji ^b   Hattori, Tadashi ^b  

^a New Business Planning Group   (Japan)

^b UNIVERSITY OF HYOGO   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ANIMAL CELL CULTURE; COPPER; ELECTROMAGNETIC WAVES; ETCHING; LITHOGRAPHY; MICROOPTICS; PLASMA ETCHING; SOCIAL SCIENCES; SURFACE STRUCTURE; SYNCHROTRON RADIATION; SYNCHROTRONS; TECHNICAL PRESENTATIONS; THREE DIMENSIONAL;

OUTER SURFACE;

WET ETCHING;

EID: 50449105817     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MHS.2006.320295     Document Type: Conference Paper

References (8)

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7. H.Mekaru, S.Kusumi, S.Yamashita, O.Shimada, T.Hattori, Japanese Journal of Applied Physics, Vol.43, No. 6B, pp. 4036-4040 (2004)
8. T.Ustumi, Japanese Journal of Applied Physics,Vo.44, No.7B, pp.5500-5504 (2005) 1