Spectrum imaging of high-k dielectric stacks

Institute of Physics Conference Series

Volumn 179, Issue , 2004, Pages 299-302

  MacKenzie, M ^a   Craven, A J ^a   McComb, D W ^b   Hamilton, D A ^a   McFadzean, S ^a  

^a UNIVERSITY OF GLASGOW   (United Kingdom)

^b IMPERIAL COLLEGE LONDON   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

DIELECTRIC STACKS; ELECTRON ENERGY LOSS NEAR EDGE STRUCTURE (ELNES); OXIDE LAYERS; SPECTRUM IMAGING;

COMPUTER SIMULATION; DATA REDUCTION; DIELECTRIC DEVICES; ELECTRON ENERGY LOSS SPECTROSCOPY; SILICON WAFERS; SPECTRUM ANALYSIS; TRANSMISSION ELECTRON MICROSCOPY;

IMAGING TECHNIQUES;

EID: 5044235624     PISSN: 09513248     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)

1. Craven A J, MacKenzie M, McComb D W and Hamilton DA 2003 IOP Conf. Series 180 (in press)
2. Jeanguillaume C and Colliex C 1989 Ultramicroscopy 28 252.
3. McComb D W, Craven A J, Hamilton DA and MacKenzie M 2003 APL (submitted for publication)
4. Ramanathan S, MeIntyre P C, Luning J, Pianetta P and Muller D A 2002 Phil. Mag. Letts. 82 519.
5. Muller D A 2003 private communication