Effect of bias voltage on Diamond-like carbon film deposited on PMMA substrate

Surface and Coatings Technology

Volumn 202, Issue 22-23, 2008, Pages 5386-5389

  Lin, Zeng ^a,b   Lv, Shao Bo ^a   Yu, Zhao Ji ^c   Li, Ming ^a   Lin, Tie Yuan ^a   Ba, De Chun ^a   Choi, Chi Kyu ^d   Lee, In Seop ^e  

^a NORTHEASTERN UNIVERSITY   (China)

^b State Key Laboratory of Plastic Forming Simulation and Die and Mould Technology   (China)

^c SHENYANG UNIVERSITY OF TECHNOLOGY   (China)

^d Jeju National University   (South Korea)

^e Yonsei University   (South Korea)

Author keywords

Bias voltage; DLC; Friction property; Hardness; PECVD; PMMA

Indexed keywords

ARCHITECTURAL ACOUSTICS; ATOMIC FORCE MICROSCOPY; ATOMIC SPECTROSCOPY; BIAS VOLTAGE; CARBON FILMS; CHEMICAL PROPERTIES; DIAMOND FILMS; DIAMOND LIKE CARBON FILMS; DIAMONDS; ELECTRIC LOAD MANAGEMENT; FRICTION; HARDNESS; IMAGING TECHNIQUES; MAGNETRON SPUTTERING; MECHANICAL PROPERTIES; MICROSCOPIC EXAMINATION; MOLECULAR ORBITALS; MOLECULAR SPECTROSCOPY; NONMETALS; PHOTOELECTRON SPECTROSCOPY; PLASMA DEPOSITION; SCANNING PROBE MICROSCOPY; SILICON; SPECTRUM ANALYSIS; SPUTTER DEPOSITION; SUBSTRATES; TRIBOLOGY; X RAY PHOTOELECTRON SPECTROSCOPY;

BALL-ON-DISK; BILAYERED FILMS; CHEMICAL STATES; DEPOSITED FILMS; DIAMOND-LIKE CARBON; DLC; DLC FILMS; FRICTION CO-EFFICIENT; FRICTION PROPERTIES; FRICTION PROPERTY; MAGNETRON-SPUTTERING DEPOSITION; NANO-INDENTER; NEGATIVE BIAS; PECVD; PMMA; POLY-METHYL METHACRYLATE; TRIBOMETER; UV-RAMAN SPECTROSCOPY; WEAR RATES;

PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;

EID: 50349101207     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2008.06.071     Document Type: Article

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