Preparation of molybdenum oxide film by a magnetic null discharge sputtering method

Surface and Coatings Technology

Volumn 202, Issue 22-23, 2008, Pages 5452-5456

  Kwak, D J ^a   Kuantama, E ^a   Han, D W ^a   Sung, Y M ^a  

^a Kyungsung University   (South Korea)

Author keywords

Magnetic null discharge sputtering; Molybdenum oxide film; Uniformity

Indexed keywords

MOLYBDENUM; MOLYBDENUM COMPOUNDS; OXIDE FILMS;

DISCHARGE SPUTTERING; MAGNETIC NULL; MAGNETIC NULL DISCHARGE SPUTTERING; MOLYBDENUM OXIDE FILM; MOLYBDENUM OXIDES; UNIFORMITY;

FILM PREPARATION;

EID: 50349099352     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2008.06.145     Document Type: Article

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