Sol-gel derived lead-free piezoelectric Bi1/2Na 1/2TiO3 thin film for MEMS applications

IEEE International Symposium on Applications of Ferroelectrics

Volumn , Issue , 2006, Pages

  Yu, Ting ^a   Kwok, Kin Wing ^a   Chan, Helen ^a  

^a HONG KONG POLYTECHNIC UNIVERSITY   (Hong Kong)

Author keywords

Lead free; MEMS; Piezoelectric; Sol gel; Thin film

Indexed keywords

BISMUTH PLATING; GELATION; TECHNICAL PRESENTATIONS;

INTERNATIONAL SYMPOSIUM; LEAD-FREE; LEAD-FREE PIEZOELECTRIC; MEMS; PIEZOELECTRIC; SOL-GEL; THIN FILM;

COLLOIDS;

EID: 50249171230     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ISAF.2006.4349274     Document Type: Conference Paper

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