Properties of thin poly(tetrafluoroethylene) films deposited on solid substrates by electron beam polymerization from vapor phase

Polymer Science - Series B

Volumn 50, Issue 7-8, 2008, Pages 204-208

  Bruk, M A ^a   Zhikharev, E N ^b   Volegova, I A ^a   Spirin, A V ^a   Teleshov, E N ^a   Kal'nov, V A ^b  

^a Federal State Unitary Enterprise   (Russian Federation)

^b RUSSIAN ACADEMY OF SCIENCES   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL REACTIONS; CURRENT DENSITY; ELECTRON BEAMS; ELECTRON GUNS; ELECTRON OPTICS; LITHOGRAPHY; MONOMERS; NONMETALS; PARTICLE BEAMS; POLYMERIZATION; POLYMERS; SILICON; VAPORS;

ELECTRON BEAM POLYMERIZATION; ELECTRON ENERGIES; ELECTRON-BEAM; POLY TETRA FLUORO ETHYLENE; SILICON SUBSTRATES; SOLID SUBSTRATES; TETRA FLUORO ETHYLENE; VAPOR-PHASE;

SUBSTRATES;

EID: 50249123130     PISSN: 15600904     EISSN: None     Source Type: Journal    
DOI: 10.1134/S1560090408070129     Document Type: Article

References (9)

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