Development of a production-ready, back-illuminated CMOS image sensor with small pixels

Technical Digest - International Electron Devices Meeting, IEDM

Volumn , Issue , 2007, Pages 1007-1010

  Joy, Tom ^a   Pyo, Sunggyu ^b,c   Park, Sunghyung ^b,c   Choi, Changhoon ^a   Palsule, Chintamani ^a   Han, Hyungjun ^b,c   Feng, Chen ^a   Lee, Sangjoo ^b,c   McKee, Jeff ^a   Altice, Parker ^a   Hong, Chris ^a   Boemler, Christian ^a   Hynecek, Jerry ^a   Louie, Michael ^a   Lee, Juil ^b,c   Kim, Daebyung ^b,c   Haddad, Homayoon ^a   Pain, Bedabrata ^a  

^a Advanced Pixel Research Center   (United States)

^b MagnaChip Semiconductor Ltd   (South Korea)

^c California Institute of Technology ^*

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRON DEVICES; IMAGE SENSORS; IMAGING TECHNIQUES; SENSORS;

BACK-ILLUMINATED; CMOS IMAGE SENSOR; CMOS SENSORS; DARK CURRENTS; FULL COLOR; MEGA PIXELS; PERFORMANCE MEASURES; PROCESS INTEGRATION; WAFER MANUFACTURING;

PIXELS;

EID: 50249108950     PISSN: 01631918     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/IEDM.2007.4419125     Document Type: Conference Paper

References (6)

1. B. Pain, Proc. 2005 Workshop on CCD/AIS, p 105-6, 2005.
2. B. Pain et al., Proc. 2007 Intl. Image Sensor Workshop, p. 158-61, 2007.
3. J. Prima et al., Proc. 2007 Intl. Image Sensor Workshop, p 5-8, 2007.
4. V. Suntharalingam et al., Tech. Dig. ISSCC, vol. 48, p. 356-7, 2005.
5. S. Iwabuchi et al., Tech Dig. ISSCC, vol. 49, p. 302-3, 2006.
6. US patent 6,902,987, June 7, 2005