Effect of transport of growing nanoparticles on capacitively coupled rf discharge dynamics

Physical Review E - Statistical, Nonlinear, and Soft Matter Physics

Volumn 78, Issue 2, 2008, Pages

  Schweigert, I V ^a,b   Alexandrov, A L ^a   Ariskin, D A ^a,b   Peeters, F M ^b   Stefanovic I ^c,d   Kovacevic E ^c   Berndt, J ^c   Winter, J ^c  

^a KHRISTIANOVICH INSTITUTE OF THEORETICAL AND APPLIED MECHANICS   (Russian Federation)

^b UNIVERSITY OF ANTWERP   (Belgium)

^c RUHR UNIVERSITY BOCHUM   (Germany)

^d UNIVERSITY OF BELGRADE   (Serbia)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMS; DISCHARGE (FLUID MECHANICS); IONIZATION; NANOPARTICLES; NANOSTRUCTURED MATERIALS; NANOSTRUCTURES; NUMERICAL ANALYSIS; PLASMAS;

CAPACITIVELY COUPLED; DIFFERENT MODES; DUST PARTICLES; FAST ELECTRONS; INITIAL STAGES; NANO-SIZE PARTICLES; NUMERICAL STUDIES; PLASMA PARAMETERS; RF DISCHARGES;

ELECTRIC DISCHARGES;

EID: 50149117181     PISSN: 15393755     EISSN: 15502376     Source Type: Journal    
DOI: 10.1103/PhysRevE.78.026410     Document Type: Article

References (14)

1. E. Kovačević, I. Stefanović, J. Berndt, and J. Winter, J. Appl. Phys. JAPIAU 0021-8979 10.1063/1.1541118 93, 2924 (2003).
2. I. Stefanović, E. Kovačević, J. Berndt, and J. Winter, New J. Phys. NJOPFM 1367-2630 5, 39.1-12 (2003).
3. P. Belenguer, J. P. Blondeau, L. Boufendi, M. Toogood, A. Plain, A. Bouchoule, C. Laure, and J. P. Boeuf, Phys. Rev. A PLRAAN 1050-2947 10.1103/PhysRevA.46.7923 46, 7923 (1992).
4. C. Bohm and J. Perrin, J. Phys. D JPAPBE 0022-3727 10.1088/0022-3727/24/ 6/011 24, 865 (1991).
5. J. P. Boeuf and Ph. Belenguer, J. Appl. Phys. JAPIAU 0021-8979 10.1063/1.350666 71, 4751 (1992).
6. I. Denysenko, J. Berndt, E. Kovačević, I. Stefanović, V. Selenin, and J. Winter, Phys. Plasmas PHPAEN 1070-664X 10.1063/1.2222258 13, 073507 (2006).
7. M. R. Akdim and W. J. Goedheer, Phys. Rev. E PLEEE8 1063-651X 10.1103/PhysRevE.67.066407 67, 066407 (2003).
8. Y. I. Chutov and W. J. Goedheer, IEEE Trans. Plasma Sci. ITPSBD 0093-3813 10.1109/TPS.2003.815490 31, 606 (2003).
9. R. Lagushenko and J. Maya, J. Appl. Phys. JAPIAU 0021-8979 10.1063/1.333365 55, 3293 (1984).
10. V. V. Ivanov, A. M. Popov, and T. V. Rakchimova, Plasma Phys. Rep. PPHREM 1063-780X 21, 548 (1995) (in Russian).
11. M. Hayashi, in Nonequilibrium Processes in Partially Ionized Gases, edited by, M. Capitelli, and, J. N. Bardsley, (Plenum, New York, 1990).
12. C. K. Birdsall and A. B. Langdon, Plasma Physics Via Computer Simulation (McGraw-Hill, New York, 1985).
13. I. V. Schweigert, V. A. Schweigert, and F. M. Peeters, Phys. Plasmas PHPAEN 1070-664X 10.1063/1.2076527 12, 113501 (2005).
14. M. S. Barnes, J. H. Keller, J. C. Forster, J. A. ONeill, and D. K. Coultas, Phys. Rev. Lett. PRLTAO 0031-9007 10.1103/PhysRevLett.68.313 68, 313 (1992).