"Membrane micro emboss following excimer laser ablation (MeME-X) process" for pressure-driven micro active catheter

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2008, Pages 62-65

  Ikeuchi, Masashi ^a   Ikuta, Koji ^a  

^a NAGOYA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ABLATION; AVIATION; COMPOSITE MICROMECHANICS; EXCIMER LASERS; GAS LASERS; LASER ABLATION; MECHANICAL ENGINEERING; MECHANICS; MECHATRONICS; MEMS; MICROELECTROMECHANICAL DEVICES; OPTICAL DESIGN; PULSED LASER DEPOSITION; REACTIVE ION ETCHING; SURGERY;

ACTIVE CATHETER; BIOCOMPATIBLE POLYMERS; EXCIMER LASER ABLATION; INTERNATIONAL CONFERENCES; INTRAVASCULAR; MICRO-ELECTRO MECHANICAL SYSTEMS; ORDERS-OF-MAGNITUDE; WATER PRESSURES;

CATHETERS;

EID: 50149111599     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2008.4443593     Document Type: Conference Paper

References (9)

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