Enhanced toxic gas detection using a MEMS preconcentrator coated with the metal organic framework absorber

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2008, Pages 232-235

  Yeom, J ^a   Oh, I ^b   Field, C ^b   Radadia, A ^b   Ni, Z ^c   Bae, B ^a   Han, J ^a   Masel, R I ^b,c   Shannon, M A ^a,c  

^a United States of America   (United States)

^b UNIVERSITY OF ILLINOIS AT URBANA CHAMPAIGN   (United States)

^c Cbana Inc   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ARSENIC COMPOUNDS; CHLORINE COMPOUNDS; COMPOSITE MICROMECHANICS; CONCENTRATION (PROCESS); GAS DETECTORS; GASES; INDUSTRIAL CHEMICALS; MECHANICAL ENGINEERING; MECHANICS; MECHATRONICS; MEMS; METALS; MICROELECTROMECHANICAL DEVICES; NANOFLUIDICS; ORGANOMETALLICS; REACTIVE ION ETCHING; TOXIC MATERIALS;

ANALYTE; DETECTION LIMIT; GAS DETECTION; INDUSTRIAL COMPOUNDS; INTERNATIONAL CONFERENCES; LOW SENSITIVITY; MATE RIAL PROPERTIES; METAL-ORGANIC FRAMEWORK; MICRO-ELECTRO MECHANICAL SYSTEMS; MICRO-FLUIDIC; NEW GENERATION; PORTABLE APPLICATIONS; PRE CONCENTRATORS; SENSITIVE DETECTION; TOXIC CHEMICALS;

PHOTORESISTS;

EID: 50149108829     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2008.4443635     Document Type: Conference Paper

References (11)

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