Batch fabrication of polymer microsystems with shape memory microactuators

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2008, Pages 423-426

  Grund, T ^a   Cuntz, T ^a   Kohl, M ^a  

^a KARLSRUHE INSTITUTE OF TECHNOLOGY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ALLOYS; COMPOSITE MICROMECHANICS; MECHANICAL ENGINEERING; MECHANICS; MECHATRONICS; MEMS; MICROELECTROMECHANICAL DEVICES; MICROSYSTEMS; MOLECULAR BEAM EPITAXY; OPTICAL DESIGN; POLYMERS; PRESSURE WELDING; REACTIVE ION ETCHING; SHAPE MEMORY EFFECT; TECHNOLOGY; ULTRASONIC WELDING; ULTRASONICS; WAFER BONDING; WELDING;

ACTIVATED BONDING; BATCH INTEGRATION; BATCH-FABRICATION; FREE BONDS; INTERNATIONAL CONFERENCES; MICRO-ELECTRO MECHANICAL SYSTEMS; MICRO-VALVES; MICROMACHINED; NEW PROCESSES; POLYMER LAYERS; PRESSURE AND TEMPERATURE; PROCESS FLOWS; SHAPE MEMORY ALLOY; SHAPE MEMORY MICROACTUATORS; VERTICAL ACCURACY; WAFER LEVELS; WELDING TESTS;

POLYMER FILMS;

EID: 50149100511     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2008.4443683     Document Type: Conference Paper

References (5)

1. M. Kohl, Y. Liu and D. Dittmann, Proc. MEMS 04, pp. 288-291.
2. T. Grund, R. Guerre, M. Despont and M. Kohl, European Physical Journal - Special Topics, EMRS-Fall Meeting '07, to be published.
3. M. Kohl, Shape memory microactuators (Springer-Verlag, 2004).
4. Truckenmüller, R., Y. Cheng, et al. (2006). "Micro ultrasonic welding: joining of chemically inert polymer microparts for single material fluidic components and systems." Microsystem Technologies V12(10): 1027-1029.
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