Tri-axial high-G CMOS-MEMS capacitive accelerometer array

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2008, Pages 876-879

  Wung, A ^a   Park, R V ^b   Rebello, K J ^b   Fedder, G K ^a  

^a CARNEGIE MELLON UNIVERSITY   (United States)

^b JOHNS HOPKINS UNIVERSITY APPLIED PHYSICS LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACCELEROMETERS; COMPOSITE MICROMECHANICS; MECHANICAL ENGINEERING; MECHANICS; MECHATRONICS; MEMS; MICROELECTROMECHANICAL DEVICES; REACTIVE ION ETCHING;

CANTILEVER STRUCTURES; CAPACITIVE ACCELEROMETERS; CAPACITIVE SENSING; CHIP-SCALE; CMOS-MEMS; HIGH-G ACCELEROMETERS; IN-PLANE MOTION; INTERNATIONAL CONFERENCES; MICRO-ELECTRO MECHANICAL SYSTEMS; OUT-OF-PLANE MOTION; PIEZORESISTIVE;

PHOTORESISTS;

EID: 50149087524     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2008.4443796     Document Type: Conference Paper

References (6)

1. Y. Ning, Y. Loke, G. McKinnon, "Fabrication and characterization of high g-force, silicon piezoresistive accelerometers." Sensors and Actuators A, vol. 48, pp. 55-61, 1995.
2. J. Suminto, "A Wide Frequency Range, Rugged Silicon Micro Accelerometer with Overrange Stops." Proc. MEMS 1996, San Diego, pp. 180-185.
3. J.M. Tsai, G.K. Fedder, "Mechanical noise-limited CMOS-MEMS accelerometers," Proc. IEEE MEMS 2005, Miami, FL, Jan. 2005, pp. 630-633.
4. H. Lakdawala and G.K. Fedder, "Temperature stabilization of CMOS capacitive accelerometers," IEEE/ASME J.MEMS, v. 13, no. 2, April 2004, pp. 559-566.
5. H. Xie, G.K. Fedder, Z. Pan and W. Frey, "Design and Fabrication of an Integrated CMOS-MEMS 3-Axis Accelerometer," in Proc. MSM '03, San Francisco, CA, February 23-27, 2003, pp. 292-295.
6. X. Zhu, Post-CMOS Micromachining of Surface and Bulk Structures, Ph.D. Thesis, May 2002, Carnegie Mellon University, Pittsburgh, PA.