The effect of substrate doping on the behaviour of a CMOS electrothermal frequency-locked-loop

TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems

Volumn , Issue , 2007, Pages 2283-2286

  Zhang, C ^a   Makinwa, K A A ^b  

^a DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

^b NONE

Author keywords

Electrothermal filter; Electrothermal FLL; Thermal diffusivity

Indexed keywords

ACTUATORS; CMOS INTEGRATED CIRCUITS; ELECTRIC HEATING; LOCKS (FASTENERS); MICROSYSTEMS; SUBSTRATES; TEMPERATURE DISTRIBUTION; THERMAL DIFFUSIVITY;

ELECTROTHERMAL FILTER; ELECTROTHERMAL FLL; FREQUENCY LOCKED LOOPS; SILICON SUBSTRATES; SUBSTRATE DOPING; TEMPERATURE DEPENDENCE; TEMPERATURE DEPENDENT; TEMPERATURE RANGE;

SOLID-STATE SENSORS;

EID: 50049130667     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2007.4300625     Document Type: Conference Paper

References (7)

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