Fabrication of vertical electrodes on channel sidewall for picoliter liquid measurement

TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems

Volumn , Issue , 2007, Pages 1613-1616

  Wei, J ^a   Van Der Velden, M ^b   Sarro, P M ^a  

^a DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

^b DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

Author keywords

Capacitive sensor; Deep RIE; MEMS; Thermal oxide

Indexed keywords

ACTUATORS; ELECTRODES; MICROSYSTEMS; NANOFLUIDICS; NONMETALS; OPTICAL DESIGN; SENSORS; SILICON; TECHNOLOGY; TRANSDUCERS;

3-D FABRICATION; BULK SILICON; BURIED OXIDES; CAPACITIVE SENSOR; CAPACITIVE SENSORS; DEEP RIE; ELECTRICAL INSULATION; IN-BETWEEN; INTERNATIONAL CONFERENCES; LIQUID MENISCUS; MEMS; MICROFLUIDIC DISPENSER; PROCESS STEPS; SILICON-BASED; SOLID-STATE SENSORS; THERMAL OXIDE; VERTICAL ELECTRODES;

METALLIZING;

EID: 50049127815     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2007.4300457     Document Type: Conference Paper

References (7)

1. K. T. Hjelt, R. van den Doel, et al., "High-Resolution Liquid Volume Detection in Sub-nanoliter Reactors", Sensors and Actuators, Vol.83, pp.61-66, 2000
2. X. Cai, N. Klauke, et al., "Ultra-Low-Volume, Real-Time Measurements of Lactate from the Single Heart Cell Using Microsystems Technology", Analytical Chemistry, Vol.74 pp. 908-914, 2002
3. R. Moerman, L. R. van den Doel, et al., "Microinjection of B-D-Glucose Standards and Amplex Red Reagent in Microarrays", Proc. SPIE, 199-128, 1999
4. M. koch, A. G. R. Evans, et al., "Design and Fabrication of a Micromachined Coulter Counter", Micromechanics Europe, Ulvik, Norway, 1998.
5. U. D. Larsen, H. Norring, et al., "Somatic Cell Counting with Silicon Apertures", presented at MicroTAS 2000, The Netherlands, 2000.
6. C. Zhang, K. Najafi, "Fabrication of Thick Silicon Dioxide Layers Using DRIE, Oxidation and Trench Refill", MEMS 2002, pp.160-163, Jan, 2002
7. Brosnihan T J, Bustillo J M, Pisano A P and Howe R T, "Embedded interconnect and electrical isolation for high-aspect-ratio", Transducers 97, Chicago, USA, pp 637-640, 1997