A three dimensional thermal sensor based on Single-Walled Carbon Nanotubes

TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems

Volumn , Issue , 2007, Pages 1023-1026

  Selvarasah, S ^a   Chen, C L ^a   Chao, S H ^a   Makaram, P ^a   Busnaina, A ^a   Dokmeci, M R ^a  

^a Northeastern University   (United States)

Author keywords

Dielectrophoretic assembly; Nanoscale integration; Single walled carbon nanotubes; Thermal sensor

Indexed keywords

ACTUATORS; DIELECTRIC DEVICES; ELECTROLYSIS; METALLIZING; MICROSYSTEMS; NANOCOMPOSITES; NANOPORES; NANOSTRUCTURED MATERIALS; NANOSTRUCTURES; NANOTECHNOLOGY; NANOTUBES; OPTICAL DESIGN; SENSORS; SINGLE-WALLED CARBON NANOTUBES (SWCN); THREE DIMENSIONAL; TRANSDUCERS;

BOTTOM-UP; CONTACT-RESISTANCE; DIELECTROPHORETIC ASSEMBLY; ELECTRODE STRUCTURES; HYBRID ASSEMBLY; INTERNATIONAL CONFERENCES; MULTI ELECTRODES; NANOSCALE INTEGRATION; PARYLENE; SINGLE-WALLED CARBON NANOTUBES; SOLID-STATE SENSORS; TEMPERATURE COEFFICIENT OF RESISTANCE; TEMPERATURE RANGES; THERMAL SENSOR; TOP-DOWN;

CARBON NANOTUBES;

EID: 50049126645     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2007.4300307     Document Type: Conference Paper

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