Fabrication and mechanical characterization of microneedle array for cell surgery

TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems

Volumn , Issue , 2007, Pages 719-722

  Shibata, T ^a   Nakanishi, A ^a   Sakai, T ^a   Kato, N ^a   Kawashima, T ^a   Mineta, T ^b   Makino, E ^b  

^a TOYOHASHI UNIVERSITY OF TECHNOLOGY   (Japan)

^b HIROSAKI UNIVERSITY   (Japan)

Author keywords

Cell surgery; Cellular MEMS; MEMS; Micromachining; Microneedles; Nanobiotechnology

Indexed keywords

ACIDS; ACTUATORS; BIOMOLECULES; CYTOLOGY; MICROSYSTEMS; MOLECULAR BIOLOGY; NONMETALS; NUCLEIC ACIDS; OPTICAL DESIGN; SENSORS; SILICA; SILICON COMPOUNDS; SURGERY; TRANSDUCERS;

CELL SURGERY; CELLULAR MEMS; CHIP-BASED SYSTEMS; INTERNATIONAL CONFERENCES; LIVING CELLS; MECHANICAL CHARACTERIZATIONS; MEMS; MICROMACHINING; MICRONEEDLE ARRAYS; MICRONEEDLES; NANOBIOTECHNOLOGY; SILICON DIOXIDES; SOLID-STATE SENSORS;

CELLS;

EID: 50049125622     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2007.4300231     Document Type: Conference Paper

References (4)

1. R. Bashir, "BioMEMS: State-of-the-Art in Detection, Opportunities and Prospects", Adv. Drug Deliv. Rev., Vol. 56, pp. 1565-1586, 2004.
2. C. Yi, C.-W. Li, S. Ji, M. Yang, "Microfluidics Technology for Manipulation and Analysis of Biological Cells", Anal. Chim. Acta, Vol. 560, pp. 1-23, 2006.
3. M. Madou, Fundamentals of Microfabrication: The Science of Miniaturization (2nd. ed.), CRC Press, Boca Raton, FL, 2002.
4. S. Franssila, Introduction to Microfabrication, John Wiley and Sons, England, 2004.