Multi-probe with metallic tips for ferroelectric recording probe storage

TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems

Volumn , Issue , 2007, Pages 2509-2512

  Takahashi, Hirokazu ^a   Mimura, Yasuhiro ^a   Mori, Shuntaro ^a   Ishimori, Masahiro ^a   Onoe, Atsushi ^a   Ono, Takahito ^b   Esashi, Masayoshi ^b  

^a PIONEER CORPORATION   (Japan)

^b TOHOKU UNIVERSITY   (Japan)

Author keywords

Diamond; Ferroelectric; Metal; Probe; SNDM; Storage; Wear

Indexed keywords

CHROMIUM; DATA STORAGE EQUIPMENT; DIAMONDS; FERROELECTRICITY; MICROSYSTEMS; NONMETALS; PLATINUM; RUTHENIUM; SENSORS; SILICON; STORAGE (MATERIALS); TRANSDUCERS;

DIAMOND; FERROELECTRIC; INTERNATIONAL CONFERENCES; METAL; METALLIC TIPS; PROBE; PROBE STORAGE; PROBE-BASED; SILICON CANTILEVERS; SNDM; SOLID-STATE SENSORS; STORAGE; ULTRA-HIGH; WEAR;

ACTUATORS;

EID: 50049118257     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2007.4300681     Document Type: Conference Paper

References (6)

1. P. Vettiger, G. Cross, M. Despont, U. Drechsler, U. Dürig, B. Gotsmann, W. Häberle, M. A. Lantz, H. E. Rothuizen, R. Stutz and G. K. Binnig, "The "millipede" - nanotechnology entering data storage", 2002 IEEE Trans. Nanotechnol., Vol. 1, pp. 39-55, 2002.
2. H. Park, J. Jung, D. K. Min, S. Kim, and S. Hong, "Scanning resistive probe microscopy: Imaging ferroelectric domains", J. Appl. Phys., Vol.84, No.10, pp. 1734-1736, 2004.
3. Y. S. Kim, C. S. Lee, W. H. Jim, S. S. Jang, H. J. Nam, and J. U. Bu, "PZT Cantilever Array with Piezoelectric Sensor and Thermo-Mechanical Heater for Probe-Based Nano-Data-Storage", Proc. ICEE2004, Sapporo, Japan, July 4-8.
4. Y.Cho, A.Kirihara and T.Saeki, "Scanning Nonlinear Dielectric Microscope", Rev. Sci. Instrum., Vol. 67, No.6, pp.2297-2303,1996.
5. Y. Cho, S. Hashimoto, N. Odagawa, K. tanaka, and Y. Hiranaga, "Realization of 10 Tbit/in.2 memory density and subnanosecond domain switching time in ferroelectric data storage", Appl. Phys. Lett., Vol. 87, pp. 232907-1-232907-3, 2005.
6. H. Takahashi, T. Ono, A. Onoe, Y. Cho and M. Esashi, "A diamond-tip probe with silicon-based piezoresistive strain gauge for high-density data storage using scanning nonlinear dielectric microscopy", Journal of Micromechanics and Microengineering, Vol.16, pp.1620-1624, 2006.