3-axes tactile sensor with tunable sensing range

TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems

Volumn , Issue , 2007, Pages 1457-1460

  Wen, Chih Chieh ^a   Lin, Chia Min ^a   Fang, Weileun ^a  

^a NATIONAL TSING HUA UNIVERSITY   (Taiwan)

Author keywords

Piezoresistor; Side wall doping; Tactile sensor; Tunable membrane

Indexed keywords

ACTUATORS; MICROSYSTEMS; OPTICAL DESIGN; OPTICAL SENSORS; POLYMERS; TOOLS; TRANSDUCERS;

FABRICATION PROCESSES; IN-PLANE; INTERNATIONAL CONFERENCES; OUT-OF PLANE; PIEZO RESISTIVE SENSORS; PIEZO-RESISTORS; PIEZORESISTOR; POLYMER MATERIALS; POLYMER MEMBRANES; SENSING RANGES; SIDE WALLS; SIDE-WALL DOPING; SOLID-STATE SENSORS; TACTILE SENSOR; TACTILE SENSORS; TUNABLE MEMBRANE;

SENSORS;

EID: 50049114367     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2007.4300419     Document Type: Conference Paper

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